Aluminium Nitride Crucible ALN Aluminium Crucible
Khoom nthuav qhia
AlN yog synthesized los ntawm thermal txo ntawm alumina los yog ncaj qha nitride ntawm alumina.Nws muaj qhov ceev ntawm 3.26 Sau npe & tiv thaiv los ntawm MarkMonitor-3, txawm hais tias nws tsis yaj, decomposes saum 2500 ° C ntawm huab cua.Cov khoom yog covalently bonded thiab resists sintering yam tsis muaj kev pab los ntawm cov kua-forming additive.Feem ntau, oxides xws li Y 2 O 3 lossis CaO tso cai rau kev ua tiav sintering ntawm qhov kub ntawm 1600 thiab 1900 ° C.
Aluminium nitride yog cov khoom siv ceramic nrog kev ua tau zoo heev, thiab nws cov kev tshawb fawb tuaj yeem taug qab mus rau ntau tshaj li ib puas xyoo dhau los.Nws yog tsim los ntawm F. Birgeler thiab A. Geuhter Pom nyob rau hauv 1862, thiab nyob rau hauv 1877 los ntawm JW MalletS Aluminium nitride tau synthesized thawj zaug, tab sis nws tsis yog siv rau ntau tshaj 100 xyoo, thaum nws yog siv los ua tshuaj chiv. .
Vim hais tias txhuas nitride yog covalent compound, nrog me me-diffusion coefficient thiab siab melting point, nws yog ib qho nyuaj rau sintering.Nws tsis yog txog thaum xyoo 1950 uas aluminium nitride ceramics tau ua tiav thawj zaug thiab siv los ua cov khoom siv refractory hauv smelting ntawm cov hlau ntshiab, txhuas thiab txhuas alloy.Txij li thaum xyoo 1970, nrog rau kev tshawb fawb tob zuj zus, cov txheej txheem kev npaj ntawm txhuas nitride tau dhau los ua neeg paub tab, thiab nws daim ntawv thov tau nthuav dav.Tshwj xeeb tshaj yog txij li thaum pib ntawm lub xyoo pua 21st, nrog rau kev loj hlob sai ntawm microelectronics technology, tshuab hluav taws xob thiab cov khoom siv hluav taws xob mus rau miniaturization, lub teeb yuag, kev sib koom ua ke, thiab kev ntseeg siab thiab siab zog tso zis kev taw qhia, ntau thiab ntau cov khoom siv ntawm cov substrate thiab ntim cov ntaub ntawv ntawm cov cua sov dissipation tso. xa mus rau cov kev xav tau siab dua, ntxiv txhawb kev loj hlob ntawm kev lag luam aluminium nitride.
Lub ntsiab nta
AlN Tiv thaiv kom yaig ntawm feem ntau cov hlau molten, tshwj xeeb tshaj yog txhuas, lithium thiab tooj liab
Nws yog resistant rau feem ntau yaig ntawm molten ntsev, nrog rau chlorides thiab cryolite
High thermal conductivity ntawm cov ntaub ntawv ceramic (tom qab beryllium oxide)
Siab ntim resistivity
High dielectric zog
Nws yog eroded los ntawm acid thiab alkali
Nyob rau hauv daim ntawv hmoov, nws yog yooj yim hydrolyzed los ntawm dej los yog noo noo noo noo
Daim ntawv thov tseem ceeb
1, daim ntawv thov piezoelectric ntaus ntawv
Aluminium nitride muaj kev tiv thaiv siab, siab thermal conductivity (8-10 npaug ntawm Al2O3), thiab qis expansion coefficient zoo ib yam li silicon, uas yog cov khoom siv zoo tshaj plaws rau kev kub siab thiab lub zog hluav taws xob hluav taws xob.
2, cov khoom siv hluav taws xob ntim substrate
Cov khoom siv feem ntau siv ceramic substrate yog beryllium oxide, alumina, aluminium nitride, thiab lwm yam., nyob rau hauv uas alumina ceramic substrate muaj thermal conductivity tsawg, thermal expansion coefficient tsis phim cov silicon;Txawm hais tias beryllium oxide muaj cov khoom zoo heev, tab sis nws cov hmoov muaj tshuaj lom heev.
Ntawm cov ntaub ntawv ceramic uas twb muaj lawm uas tuaj yeem siv los ua cov khoom siv substrate, silicon nitride ceramic muaj qhov siab tshaj plaws khoov lub zog, zoo hnav tsis kam, yog cov khoom siv ceramic nrog kev ua haujlwm zoo tshaj plaws, thiab qhov tsawg tshaj plaws thermal expansion coefficient.Aluminium nitride ceramics muaj cov thermal conductivity, zoo thermal cuam tshuam tsis kam, thiab tseem muaj cov khoom siv zoo ntawm qhov kub thiab txias.Hais txog kev ua tau zoo, aluminium nitride thiab silicon nitride yog tam sim no cov ntaub ntawv tsim nyog tshaj plaws rau cov khoom ntim hluav taws xob, tab sis lawv kuj muaj qhov teeb meem tshwm sim yog tias tus nqi siab dhau lawm.
3, thiab siv rau cov khoom siv luminescent
Qhov siab tshaj plaws ntawm qhov ncaj bandgap qhov sib txawv ntawm txhuas nitride (AlN) yog 6.2 eV, uas muaj ntau dua photoelectric conversion efficiency piv rau indirect bandgap semiconductor.AlN Raws li ib qho tseem ceeb xiav lub teeb thiab UV lub teeb-emitting khoom, nws yog siv rau UV / sib sib zog nqus UV teeb-emitting diode, UV laser diode thiab UV ntes.Ntxiv mus, AlN tuaj yeem tsim cov kev daws teeb meem tas mus li nrog pab pawg III nitrides xws li GaN thiab InN, thiab nws cov ternary lossis quaternary alloy tuaj yeem hloov kho nws qhov sib txawv ntawm qhov pom mus rau tob ultraviolet bands, ua rau nws yog ib qho tseem ceeb ntawm cov khoom siv luminescent.
4, uas yog siv rau cov khoom siv substrate
AlN crystals yog ib qho zoo tagnrho substrate rau GaN, AlGaN thiab AlN epitaxial cov ntaub ntawv.Piv nrog sapphire los yog SiC substrate, AlN muaj ntau thermal match nrog GaN, muaj ntau dua chemical compatibility, thiab tsis tshua muaj kev nyuaj siab ntawm substrate thiab epitaxial txheej.Yog li ntawd, thaum AlN siv lead ua yog siv los ua GaN epitaxial substrate, nws tuaj yeem txo qhov tsis xws luag hauv cov cuab yeej, txhim kho kev ua haujlwm ntawm lub cuab yeej, thiab muaj kev cia siab rau kev thov zoo hauv kev npaj kub, siab zaus thiab lub zog hluav taws xob siab. khoom siv.
Tsis tas li ntawd, AlGaN epitaxial cov ntaub ntawv substrate nrog AlN siv lead ua raws li lub siab txhuas (Al) tivthaiv tuaj yeem txo qhov tsis xws luag hauv txheej txheej nitride epitaxial, thiab txhim kho kev ua haujlwm thiab kev pabcuam lub neej ntawm nitride semiconductor ntaus ntawv.Qhov zoo tshaj plaws txhua hnub-dig muag detectors raws li AlGaN tau ua tiav tiav.
5, siv nyob rau hauv ceramics thiab cov ntaub ntawv refractory
Aluminium nitride tuaj yeem siv rau sintering ntawm cov qauv ceramics, npaj aluminium nitride ceramics, tsis tsuas yog cov khoom siv zoo, folding lub zog siab dua Al2O3 thiab BeO ceramics, siab hardness, tab sis kuj kub thiab corrosion kuj.Siv AlN ceramic thaum tshav kub kub ua hauj thiab corrosion kuj, nws yuav siv tau los ua kom kub corrosion resistant qhov chaw xws li crucible thiab Al evaporation phaj.Tsis tas li ntawd, cov ntshiab AlN ceramics yog cov xim tsis muaj pob tshab, nrog cov khoom siv kho qhov muag zoo heev, thiab tuaj yeem siv los ua qhov kub thiab txias infrared qhov rais thiab cov txheej txheem kub resistant rau pob tshab ceramics tsim hluav taws xob kho qhov muag.
6. Cov khoom sib xyaw
Epoxy resin / AlN cov khoom sib xyaw, ua cov khoom ntim, yuav tsum muaj cov thermal conductivity zoo thiab muaj peev xwm ua kom sov, thiab qhov yuav tsum tau ua kom nruj.Raws li cov khoom siv polymer nrog cov khoom siv tshuaj zoo thiab kev ruaj ntseg, epoxy resin yog ib qho yooj yim los kho, nrog tsawg shrinkage tus nqi, tab sis cov thermal conductivity tsis siab.Los ntawm kev ntxiv AlN nanoparticles nrog cov thermal conductivity zoo rau epoxy resin, thermal conductivity thiab lub zog tuaj yeem txhim kho tau zoo.
